Kavli Nanolab Delft is the research facility for nanofabrication at TU Delft, Faculty of Applied Sciences, and is part of the university's successful Kavli Institute of Nanoscience Delft. The Kavli Nanolab Delft is a research facility that concentrates the nanoscience activities in Delft, in particular the ones from the Department of Quantum Nanoscience and the Department of Bionanoscience which together form the Kavli Institute of Nanoscience Delft.
The Kavli Nanolab and Else Kooi Lab provide a technological infrastructure for the fabrication and inspection of functional nanostructures, microelectromechanical systems (MEMS) and active micro devices (e.g. photodetectors). The facilities specialize in fabrication of quantum devices, MEMS, semiconductor active devices, bio imaging and super resolution microscopy. Kavli Nanolab offers 24/7 low-threshold user access to high-end, state-of-the-art process and inspection equipment for academic as well as industrial users.
Horizontal atmospheric and Low Pressure Chemical Vapor Deposition (LPCVD) furnaces are essential equipment at Kavli Nanolab Delft and Else Kooi Lab for the users in order to fabricate their devices with ultra-clean and high-quality dielectric layers, such as silicon oxide, nitride and carbide. The substrates have lateral dimensions varying from several millimetres chips, up to full 6" wafer. About 150 trained and authorized users per year (2021-2022 data from NIS) use the aforementioned Tempress systems, in total running more than 10 deposition and thermal processes per day, using more than 10000 active tool hours per year.
It is the contracting authorities belief, that Tempress B.V. is the only supplier that offers the unique combination of required specifications and additional needs/benefits of/for the university, which are necessary for the most successful continuation of the atmospheric and LPCVD furnaces processes for the internal and external users. The contracting authority intends to award the contract for the replacement of the old 28 Tempress furnaces by the purchase of 12 new TS8604 furnaces to Tempress B.V.